PME 5441-0

Brief

In this "Design and manufacture of miniaturized systems" course, approaches that are commonly used in nano- and micro-scale fabrication processes will be introduced. Some state-of-the-art fabrication technologies for miniaturized systems will be discussed in the class as well.

Description

Course keywords: 奈米,微米,製程,設計,微小化,nano, micro, fabrication, design, miniaturized Design and manufacture of miniaturized systems Outline Ch2. Vacuum Technology Ch3. Deposition Technologies Ch4. Etching Technologies Ch5. Doping and Surface Modification Ch6. Lithography Ch7. LIGA Ch8. Nanofabrication by Self-Assembly Ch9. Wafer Planarization and Bonding Ch10. Contamination Control Ch11. Device Fabrication—Example Textbook: Gatzen, Hans H., Saile, Volker, Leuthold, Jurg, “Micro and Nano Fabrication-Tools and Processes,” Springer (2015). Grading: Attendance and participation: 30% Reports: 70% 1st Report (group presentation): Starting from Chapter 4 (range: Ch4, Ch5, Ch6) 2nd Report (individual presentation): December 24 (title and outline of the second report have to be sent to me via email by December 3. The title is regarding novel NEMS/MEMS fabrication techniques that are not included in this textbook.)

Timetable

Remarks

動機系大學部精密機械與智慧製造學程選修

Restrictions

Compulsory

Elective

Cross Discipline

First Specialization

Second Specialization